Lithography

Spin-coating and baking hoods ISO5 (Class 100) for photoresists and electron beam resists
Drying ovens and optical microscope with green illumination (safelight), fridge and freezer

*Resists: AZ1505, AZ1518, AZ4533, AZ9260, AZ5214E, AZ MIR701, SU-8 2000.5, ma-N 2403, S1818-G2, LOR 30B, PEDOT:PSS (Al 4083)

Electron Beam Lithography Raith Pioneer

*HVmax: 30kV

*Interferometric stage

*Resists: PMMA, CSAR62; HSQ (FOX16, HSQ15), ma-N 2405

Conductive coating: Electra 94

*Gas injector (SiOx) Orsay Physics

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