Lithography
Spin-coating and baking hoods ISO5 (Class 100) for photoresists and electron beam resists
Mask aligner Süss MJB4
Drying ovens and optical microscope with green illumination (safelight), fridge and freezer
Laser interferometry setup with Lloyd's mirror
*Resists: AZ1505, AZ1518, AZ4533, AZ9260, AZ5214E, AZ MIR701, SU-8 2000.5, ma-N 2403, S1818-G2, LOR 30B, PEDOT:PSS (Al 4083)
Electron Beam Lithography Raith Pioneer
*HVmax: 30kV
*Interferometric stage
*Resists: PMMA, CSAR62; HSQ (FOX16, HSQ15), ma-N 2405
Conductive coating: Electra 94
*Gas injector (SiOx) Orsay Physics
