Etching

Wet etching and electrochemistry: 6 hoods ISO5 (Class 100)

*Substrate cleaning (solvents and UVzone)/nanomaterials coating/lift-off

*Acids/bases/electrochimistry

*Gas lines: N2, Ar, He, O2, CHF3, H2, C2H4, Cl2, BCl3

Scroll to Top